Design and Fabrication Procedure for High Q RF MEMS Resonators

Microwave Journal

Volumn 47, Issue 2, 2004, Pages 60-74

  Hsu, Wan Thai ^a   Best, W Scott ^b   De Los Santos, Héctor J ^c  

^a Discera Inc   (United States)

^b Triangle ElectroMagnetics LLC   (United States)

^c NanoMEMS Research LLC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DISK RESONATORS; FREQUENCY SELECTION; MICROMECHANICAL RESONATORS;

INTEGRATED CIRCUITS; MICROELECTROMECHANICAL DEVICES; POLYSILICON; PRODUCT DESIGN; Q FACTOR MEASUREMENT; SIGNAL PROCESSING; SILICON WAFERS; WIRELESS TELECOMMUNICATION SYSTEMS;

RESONATORS;

EID: 1242309339     PISSN: 01926225     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (8)

1. GNU Software Defined Radio, http://www.gnu.org/software/gnuradio/gnuradio.html.
2. C.T.C. Nguyen, "Frequency-selective MEMS for Miniaturized Low Power Communication Devices," IEEE Transactions on Microwave Theory and Techniques, Vol. 47, No. 8, August 1999, pp. 1486-1503.
3. K.Y. Hashimoto, Surface Acoustic Wave Devices in Communications, Modeling and Simulation, Springer-Verlag, New York, NY, 2000.
4. J.D. ver der Tang and D. Kasperkovitz, "A Low Phase Noise Reference Oscillator with Integrated pMOS Varactors for Digital Satellite Receivers, " IEEE Journal of Solid-State Circuits, Vol. 35, No. 8, August 2000, p. 1238.
5. th International Conference on Solid-State Sensors & Actuators (Transducers '01), Munich, Germany, June 10-44, 2001, pp. 1094-1097.
6. th International IEEE on Micro-Electro-Mechanical Systems Conference, Orlando, FL, January 17-21, 1999, pp. 453-458.
7. F.D. Bannon III and C.T.C. Nguyen, "High Frequency Microelectromechanical IF Filters," http://www.eecs.umich.edu/̃ctnguyen/iedm96.corr.mkr.pdf. Technical Digest, IEEE Electron Devices Meeting, San Francisco, CA, December 8-11, 1996, pp. 773-776.
8. Ansys Multiphysics, http://www.ansys.com/ansys/multiphysics.htm.