Kinetic Monte Carlo simulation of SiC nucleation on Si(111)

Physica Status Solidi (A) Applied Research

Volumn 201, Issue 2, 2004, Pages 333-337

  Schmidt, A A ^a   Safonov, K L ^a   Trushin, Yu V ^a   Cimalla, V ^b   Ambacher, O ^b   Pezoldt, J ^b  

^a IOFFE INSTITUTE   (Russian Federation)

^b ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; CARBON; COMPUTER SIMULATION; DIFFUSION; MOLECULAR BEAM EPITAXY; MOLECULAR DYNAMICS; MONTE CARLO METHODS; NANOSTRUCTURED MATERIALS; NUCLEATION; REACTION KINETICS; SEMICONDUCTING SILICON; VACUUM APPLICATIONS;

KINETIC MONTE CARLO (KMC) SIMULATION; SOLID SOURCE MOLECULAR BEAM EPITAXY (SSMBE);

SILICON CARBIDE;

EID: 1242287981     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssa.200303962     Document Type: Conference Paper

References (8)

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