Evaluation of carbon surface diffusion on silicon by using surface phase transitions

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4348, Issue , 2001, Pages 173-177

  Scharmann, F ^a   Maslarski, P ^a   Lehmkuhl, D ^a   Stauden, Th ^a   Pezoldt, J ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; DIFFUSION; ELECTRON DIFFRACTION; PHASE TRANSITIONS; SILICON;

DIFFUSION COEFFICIENT; SURFACE DIFFUSION;

SURFACE PHENOMENA;

EID: 0034940636     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.417645     Document Type: Conference Paper

References (12)

1. Cubic group III nitrides
2. Growth kinetics in two-dimensional phase transitions