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Volumn 84, Issue 5, 2004, Pages 687-689
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Thermal conductivity of periodic microporous silicon films
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Author keywords
[No Author keywords available]
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Indexed keywords
LOW-PRESSURE CHEMICAL VAPOR DEPOSITION (LPCVD);
MEAN FREE PATHS;
REACTIVE-ION ETCHING (RIE);
CHEMICAL VAPOR DEPOSITION;
COMPUTER SIMULATION;
CRYOSTATS;
EVAPORATION;
HEAT RESISTANCE;
MATHEMATICAL MODELS;
MICROPOROUS MATERIALS;
MONTE CARLO METHODS;
POROSITY;
REACTIVE ION ETCHING;
SILICON ON INSULATOR TECHNOLOGY;
THERMAL CONDUCTIVITY;
THIN FILMS;
SILICON WAFERS;
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EID: 1242286933
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1642753 Document Type: Article |
Times cited : (225)
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References (19)
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