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Volumn 84, Issue 5, 2004, Pages 687-689

Thermal conductivity of periodic microporous silicon films

Author keywords

[No Author keywords available]

Indexed keywords

LOW-PRESSURE CHEMICAL VAPOR DEPOSITION (LPCVD); MEAN FREE PATHS; REACTIVE-ION ETCHING (RIE);

EID: 1242286933     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1642753     Document Type: Article
Times cited : (225)

References (19)
  • 9
    • 1242283469 scopus 로고    scopus 로고
    • Ph.D. thesis, University of California at Los Angeles, Los Angeles, CA
    • D. Song, Ph.D. thesis, University of California at Los Angeles, Los Angeles, CA, 2003.
    • (2003)
    • Song, D.1
  • 15
    • 0001302687 scopus 로고
    • A. Eucken, Forsch. Ceram. Abstr. 11, 576 (1932); 12, 231 (1933).
    • (1933) Forsch. Ceram. Abstr. , vol.12 , pp. 231


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.