Use of life-cycle inventory as a screening tool for environmental performance: Supercritical carbon dioxide in the semiconductor industry

Environmental Progress

Volumn 23, Issue 4, 2004, Pages 284-290

  Blowers, Paul ^a   Titus, Monica ^a  

^a UNIVERSITY OF ARIZONA   (United States)

Author keywords

Life cycle inventory; Semiconductor manufacturing; Supercritical carbon dioxide

Indexed keywords

ECONOMIC EVALUATION; LIFE-CYCLE INVENTORY (LCI); SEMICONDUCTOR MANUFACTURING; SUPERCRITICAL CARBON DIOXIDE;

CARBON DIOXIDE; COOLING; COSTS; ENVIRONMENTAL ENGINEERING; ENVIRONMENTAL IMPACT; HEATING; INDUSTRIAL ECONOMICS; LIFE CYCLE; PURGING; REFRIGERATION; SCREENING; SEMICONDUCTOR DEVICE MANUFACTURE; SOLVENTS;

SUPERCRITICAL FLUIDS;

EID: 12344334499     PISSN: 02784491     EISSN: None     Source Type: Trade Journal    
DOI: 10.1002/ep.10047     Document Type: Article

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