Single-crystal relaxor ferroelectric piezoactuators with interdigitated electrodes

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 51, Issue 12, 2004, Pages 1593-1598

  Levy, Miguel ^a   Vanga, Raghav ^a   Moon, Kee S ^a   Park, Heung K ^a   Hong, Yong K ^a  

^a MICHIGAN TECHNOLOGICAL UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FERROELECTRIC FILMS; FERROELECTRIC PIEZOACTUATORS; INTERDIGITATED ELECTRODES;

ELECTRODES; HYSTERESIS; MICROELECTROMECHANICAL DEVICES; MODULATION; SINGLE CRYSTALS; ULTRASONIC TRANSDUCERS;

FERROELECTRIC DEVICES;

EID: 12344312920     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2004.1386677     Document Type: Article

References (23)

1. S. E. Park and T. R. Shrout, "Ultrahigh strain and piezoelectric behavior in relaxor based ferroelectric single crystals," J. Appl. Phys., vol. 82, pp. 1804-1811, Aug. 1997.
2. H. Fu and R. E. Cohen, "Polarization rotation mechanism for ultrahigh electromechanical response in single-crystal piezo-electrics," Nature, vol. 403, pp. 281-283, Jan. 2000.
3. 3 single crystals," J. Appl. Phys., vol. 85, pp. 2810-2814, Mar. 1999.
4. 3 ceramics," Appl Phys. Lett., vol. 78, pp. 2551-2553, Apr. 2001.
5. 3 morphotropic phase boundary," Ferroelect. Lett., vol. 12, no. 3, pp. 63-69, 1990.
6. T. R. Gururaja, W. A. Schulze, T. R. Shrout, A. Safari, L. Webster, and L. E. Cross, "High frequency applications of PZT/polymer composite materials," Ferroelectrics, vol. 39, pp. 1245-1248, Oct. 1981.
7. M. K. Lee, W. D. Cowan, B. M. Welsh, V. M. Bright, and M. C. Roggemann, "Aberration-correction results from a segmented micro-electromechanical deformable mirror and a refractive lenslet array," Opt. Lett., vol. 23, pp. 645-647, Apr. 1998.
8. W. D. Cowan, M. K. Lee, B. M. Welsh, V. M. Bright, and M. C. Roggemann, "Surface micromachined segmented mirrors for adaptive optics," IEEE J. Selected Topics Quantum Electron., vol. 5, pp. 90-101, Feb. 1999.
9. M. C. Roggemann, V. M. Bright, B. M. Welsh, W. D. Cowan, and M. K. Lee, "Microelectromechanical deformable mirrors for aberration control in optical systems," Opt. Quantum Electron., vol. 31, pp. 451-468, July 1999.
10. M. Levy, S. Ghimire, A. K. Bandyopadhyay, Y. K. Hong, K. Moon, S. Bakhru, and H. Bakhru, "PZN-PT single-crystal thin film monomorph actuator," Ferroelect. Lett., vol. 29, no. 3-4, pp. 29-40, 2002.
11. J. E. Spanier, M. Levy, I. P. Herman, R. M. Osgood, Jr., and A. S. Bhalla, "Single-crystal, mososcopic films of PZN-PT: Formation and micro-raman diagnosis," Appl. Phys. Lett., vol. 79, pp. 1510-1512, Sep. 2001.
12. M. Levy, R. M. Osgood, Jr., A. S. Bhalla, R. Guo, L. E. Cross, A. Kumar, and H. Bakhru, "Stress tuning in crystal ion slicing to form single-crystal potassium tantalate films," Appl. Phys. Lett., vol. 77, pp. 2124-2126, Oct. 2000.
13. 3 thin films," Appl. Phys. Lett., vol. 76, pp. 1407-1409, Mar. 2000.
14. 3 films," Appl. Phys. Lett., vol. 74, pp. 3197-3199, May 1999.
15. M. Levy, R. M. Osgood, Jr., R. Liu, L. E. Cross, G. S. Cargill, III, A. Kumar, and H. Bakhru, "Fabrication of single-crystal lithium niobate films by crystal ion slicing," Appl. Phys. Lett., vol. 73, pp. 2293-2295, Oct. 1998.
16. J. A. Perreault, T. G. Bifano, B. M. Levine, and M. N. Horenstein, "Adaptive optic correction using microelectromechanical deformable mirrors," Opt. Eng., vol. 41, pp. 561-566, Mar. 2002.
17. C.-M. Ho, "Fluidics-The link between micro and nano sciences and technologies," in 14th IEEE Int. Conference on Microelectromechanical Systems: Technical Digest, Piscataway, NJ: IEEE, pp. 375-384, Jan. 2001.
18. F. Lowrie, M. Cain, and M. Stewart, "Finite element modeling of electroceramics," Teddington, Middlesex, UK: National Physical Laboratory, CMMT(A) 150, pp. 1-21, Jan. 1999.
19. 3 based ceramics," Ferroelectrics, vol. 95, pp. 161-164, July 1989.
20. 3 single crystals," J. Appl. Phys., vol. 87, pp. 7438-7441, May 2000.
21. 3 single crystal with engineered domains," Mater. Lett., vol. 57, pp. 1305-1308, 2003.
22. 3 single crystal with designed multidomains, IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 47, pp. 285-291, Jan. 2000.
23. 3 single crystal and its frequency dependence," Appl. Phys. Lett., vol. 80, pp. 1043-1045, Feb. 2002.