Low cost single mode waveguide fabrication allowing passive fiber coupling using LIGA and UV flood exposure

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5454, Issue , 2004, Pages 64-74

  Henzi, P ^a   Rabus, D G ^a   Bade, K ^a   Wallrabe, U ^a   Mohr, J ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

LIGA; Micro optical bench; Passive fiber coupling; Polymer waveguide; UV induced

Indexed keywords

ALIGNMENT; COPOLYMERS; COST EFFECTIVENESS; FABRICATION; OPTICAL DEVICES; PHOTOLITHOGRAPHY; QUARTZ;

LIGA; MICRO-OPTICAL BENCH; PASSIVE FIBER-COUPLING; POLYMER WAVEGUIDES; UV INDUCED;

OPTICAL WAVEGUIDES;

EID: 12344280170     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.544477     Document Type: Conference Paper

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