Wafer-scale replication and testing of micro-optical components for VCSELs

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5453, Issue , 2004, Pages 13-26

  Gimkiewicz, Christiane ^a   Moser, Michael ^b   Obi, Samuel ^a   Urban, Claus ^a   Pedersen, Jörn S ^a   Thiele, Hans ^a   Zschokke, Christian ^a   Gale, Michael T ^a  

^a CSEM   (Switzerland)

^b Bookham Inc   (Switzerland)

Author keywords

Micro Optics; Replication; UV Casting; VCSEL

Indexed keywords

LITHOGRAPHY; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROLENSES; MOLECULAR BEAM EPITAXY; OPTICAL PROPERTIES; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTOR LASERS; SOL-GELS;

REPLICATION; TRANSCEIVER MODULES; UV-CASTING; VERTICAL-CAVITY SURFACE-EMITTING LASERS (VCSEL);

MICROOPTICS;

EID: 12344262164     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.544793     Document Type: Conference Paper

References (13)

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