Influence of substrate bombardment on sputtered a-Si:N thin film properties

Physica B: Condensed Matter

Volumn 355, Issue 1-4, 2005, Pages 270-279

  Attaf, A ^a   Benkhedir, M L ^a   Aida, M S ^a  

^a Universite Mentouri Constantine   (Algeria)

Author keywords

Conduction mechanism; Dielectric; Silicon nitride; Sputtering; Thin films

Indexed keywords

CURRENT TRANSPORT; DIELECTRIC ENCAPSULATION; WAVE NUMBERS;

CONTINUUM MECHANICS; DIELECTRIC MATERIALS; ELECTRIC FIELD EFFECTS; ION BOMBARDMENT; MICROELECTRONICS; SILICON NITRIDE;

THIN FILMS;

EID: 11844293474     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physb.2004.11.004     Document Type: Article

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