Inductively coupled plasma etching of (Ba,Sr)TiO3 thin films

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 4, 1998, Pages 1891-1893

  Lee, H M ^a   Kim, D C ^a   Jo, W ^a   Kim, K Y ^a  

^a LG   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 11644298831     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (12)

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