A simple electron-beam lithography system

Ultramicroscopy

Volumn 102, Issue 3, 2005, Pages 215-219

  Mølhave, Kristian ^a   Madsen, Dorte Nørgaard ^a   Bøggild, Peter ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

e Beam lithography; Electron optics; Electron beam deposition; Electron beam induced deposition; SEM

Indexed keywords

ELECTRON-BEAM DEPOSITION; ELECTROSTATIC DEFLECTOR PLATE SYSTEM; THREE-DIMENSIONAL (3D) NANOSTRUCTURES;

ELECTRODEPOSITION; ELECTRON BEAMS; ELECTROSTATICS; IMAGE RECONSTRUCTION; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; OPTICAL RESOLVING POWER; SCANNING; SCANNING ELECTRON MICROSCOPY; THREE DIMENSIONAL;

ELECTRON BEAM LITHOGRAPHY;

ANALYTIC METHOD; ARTICLE; CALCULATION; ELECTRON; ELECTRON BEAM; NANOTECHNOLOGY; SCANNING ELECTRON MICROSCOPY; THEORETICAL STUDY;

EQUIPMENT DESIGN; MICROSCOPY, ELECTRON, SCANNING; NANOTECHNOLOGY; OPTICS;

EID: 11444260559     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2004.09.011     Document Type: Article

References (18)

1. P. Avouris Acc. Chem. Res. 35 2002 1026
2. P.G. Collins, M.S. Arnold, and P. Avouris Science 292 2001 706
3. Y. Cui, and C.M. Lieber Science 291 2001 851
4. Y. Huang, X. Duan, Y. Cui, L.J. Lauhon, K. Kim, and C.M. Lieber Science 294 2001 1313
5. A.M. Fennimore, T.D. Yuzvinsky, Wei-Qiang Han, M.S. Fuhrer, J. Cumings, and A. Zettl Nature 424 2003 408
6. H.W.P. Koops, J. Kretz, M. Rudolph, M. Weber, G. Dahm, and K.L. Lee Jpn. J. Appl. Phys. 33 1994 7099
7. I.W. Rangelow, T. Gotszalk, N. Abedinov, P. Grabiec, and K. Edinger Microelectron. Eng. 57-58 2001 737
8. D.N. Madsen, K. Mølhave, R. Mateiu, A.M. Rasmussen, M. Brorson, C.J.H. Jacobsen, and P. Bøggild Nano. Lett. 3 2003 47
9. K. Mølhave, D.N. Madsen, A.M. Rasmussen, A. Carlsson, C.C. Appel, M. Brorson, C.J.H. Jacobsen, and P. Bøggild Nano. Lett. 3 2003 1499
10. P.W. Hawkes, and E. Kasper Principles of Electron Optics vol. 1 1989 Academic Press New York
11. S. Pape Møller Nucl. Instr. Meth. In Phys. Res. A 394 1997 281
12. R.H. Roberts, M.M. El Gomati, J. Kudjoe, I.R. Barkshire, S.J. Bean, and M. Prutton Meas. Sci. Technol. 8 1997 536
13. P. Rai-Choudhury (Ed.), Handbook of Microlithography, Micromachining, and Microfabrication, vol. I, SPIE, 1997.
14. G. Owen Rep. Prog. Phys. 48 1985 795
15. W. Paul Rev. Mod. Phys. 62 1990 531
16. D.R. Denison J. Vac. Sci. Technol. 8 1971 266
17. K. Mølhave, T.M. Hansen, D.N. Madsen, and P. Bøggild J. Nanosci. Nanotechnol. 4 2004 279
18. K. Mølhave, D.N. Madsen, S. Dohn, and P. Bøggild Nanotechnology 15 2004 1047