A miniature, all-electrostatic, field emission electron column for surface analytical microscopy

Measurement Science and Technology

Volumn 8, Issue 5, 1997, Pages 536-545

  Roberts, R H ^a   El Gomati, M M ^a   Kudjoe, J ^a   Barkshire, I R ^a   Bean, S J ^a   Prutton, M ^a  

^a UNIVERSITY OF YORK   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAMS; ELECTROSTATIC DEVICES; OPTICAL RESOLVING POWER;

BEAM CURRENTS; FIELD EMISSION ELECTRON COLUMNS;

FIELD EMISSION MICROSCOPES;

EID: 0031140718     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/8/5/012     Document Type: Article

References (21)

1. Cleaver J R A and Ahmed H 1985 A combined electron and ion beam lithography system J. Vac. Sci. Technol. B 3 144
2. Veneklasen L H, Todd G and Poppa H 1978 A high resolution field emission column for microprobe analysis Electron Microscopy (Toronto: Microscopical Society of Canada) p 12
3. Todd G and Poppa H 1978 Some performance tests of microarea AES J. Vac. Sci. Technol. 15 672
4. El Gomati M M, Browning R and Prutton M 1985 An all-electrostatic small beam diameter, high probe current field-emission electron probe J. Phys. E: Sci. Instrum. 18 32
5. El Gomati M M and Prutton M 1985 A miniature variable energy electron probe for nanometric analysis Inst. Phys. Conf. Ser. vol 78, p 133
6. Swanson L W 1975 Comparative study of the zirconiated and built-up W thermal-field cathode J. Vac. Sci. Technol. 12 1228
7. Cumming A D C and Smith K C A 1979 Microcircuit Engineering (Cambridge: Cambridge University Press)
8. Kuroda K, Ebisui E and Suzuki T 1974 Three anode accelerating electron lens system for the field emission scanning electron microscope J. Appl. Phys. 45 2338
9. Riddle G H N 1978 Electrostatic einzel lenses with reduced spherical aberration for use in field-emission guns J. Vac. Sci. Technol. 15 857
10. El Gomati M M 1985 The relation between the spherical and chromatic aberration coefficients in object and image planes Optik 72 41
11. Prutton M, Walker C G H, Greenwood J C, Kenny P G, Dee J C, Barkshire I R, Roberts R H and El Gomati MM 1991 A third-generation Auger microscope using parallel multispectral data acquisition and analysis Surf. Interface Anal. 17 71
12. Reimer L 1985 Scanning Electron Microscopy (Berlin: Springer)
13. Reimer L, Golla U, Bongeler R, Kassens M, Schindler B and Senkel R 1992 Charging of bulk specimens, insulating layers and free-supporting films in scanning electron microscopy Optik 92 14
14. Madden H H and Houston J E 1976 Correction of distortions in spectral line profiles: applications to electron spectroscopy J. Appl. Phys. 47 3071
15. Greenwood J C, Prutton M and Roberts R H 1994 Atomic-number dependence of the secondary-electron cascade from solids Phys. Rev. B 49 12485
16. Munro E 1975 A set of computer programs for calculating the properties of electron lenses Cambridge University Report CUEDIB-ELECT.TR45
17. van der Steen H W G and Barth J E 1989 Practical optimisation of multielectrode lenses J. Vac. Sci. Technol. B 7 1886
18. Swanson L W and Martin N A 1975 Field electron cathode stability studies: zirconium/tungsten thermal field cathode J. Appl. Phys. 46 2029
19. El Gomati M M and Matthew J A D 1988 Scanning low energy electron loss microscopy (SLEELM): Au on Si Vacuum 38 209
20. El Gomati M M, Prutton M, Lamb B and Tuppen C G 1988 Edge effects and image contrast in scanning Auger microscopy: a theory/experiment comparison Surf. Interface Anal. 11 251
21. Cota-Araiza L and Poppa H 1984 The 1D and 2D mapping of surface, subsurface and interfacial properties with secondary, backscattered and Auger electrons Appl. Surf. Sci. 18 414