MOCVD of KNbO3 ferroelectric films and their characterization

Chemical Vapor Deposition

Volumn 10, Issue 6, 2004, Pages 318-324

  Romanov, Mikhail V ^a   Korsakov, Igor E ^a   Kaul, Andrey R ^a   Stefanovich, Sergey Yu ^a   Bolshakov, Ivan A ^a   Wahl, Georg ^b  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

^b TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

Isopiestic method; MOCVD; Niobium precursor; Potassium niobium oxide; Second harmonic measurements

Indexed keywords

ANNEALING; CRYSTALLOGRAPHY; DEPOSITION; FERROELECTRIC THIN FILMS; HEATING; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROSTRUCTURE; NONLINEAR OPTICS; PHASE TRANSITIONS; SECOND HARMONIC GENERATION; STOICHIOMETRY; X RAY DIFFRACTION;

ISOPIESTIC METHOD; NIOBIUM PRECURSORS; POTASSIUM NIOBIUM OXIDE; RF SPUTTERING;

POTASSIUM COMPOUNDS;

EID: 11344290783     PISSN: 09481907     EISSN: None     Source Type: Journal    
DOI: 10.1002/cvde.200306302     Document Type: Article

References (34)

1. G. Shirane, H. Danner, A. Pavlovic, R. Pepinsky, Phys. Rev. 1954, 96, 672.
2. D. Fluck, J. Moll, P. Günter, M. Fleuster, C. Buchal, Electron. Lett. 1992, 28, 1092.
3. M. Zgonik, R. Schlesser, I. Biaggio E. Voit, J. Tscherry, P. Gunter, J. Appl. Phys. 1993, 74, 1287.
4. K. Yamanouchi, Y. Wagatsuma, H. Odagawa, Y. Cho, J. Eur. Ceram. Soc. 2001, 21, 2791.
5. S. Wada, A. Seike, T. Tsurumi, Jpn. J. Appl. Phys. Part 1 2001, 40, 5690.
6. U. Flückger, H. Arend, J. Cryst. Growth 1978, 43, 406.
7. M. H. Francomble, in Physics of Thin Films (Eds. M. H. Francomble, J. L. Vossenc), Academic Press, San Diego, CA 1993, p. 225.
8. B. W. Wessels, J. Cryst. Growth 1998, 195, 706.
9. H. Endo, M. J. Cima, Mater. Res. Soc. Symp. Proc. 1993, 310, 325.
10. S. L. Swartz, P. J. Melling, C. S. Grant. Mater. Res. Soc. Symp. Proc. 1989, 152, 227.
11. S. Schwyn Thony, H. W. Lehmann, Appl. Phys. Lett. 1992, 62, 373.
12. S. R. Sashital, S. Krishnakamur, S. Esener, Appl. Phys. Lett. 1993, 62, 2917.
13. L. S. Hung, L. A. Bosworth, Appl. Phys. Lett. 1993, 62, 2625.
14. C. Zaldo, D. S. Gill, R. W. Eason, J. Mendiola, P. J. Chandler, Appl. Phys. Lett. 1994, 65, 502.
15. M. J. Nystrom, B. W. Wessels, D. B. Studebaker, T. J. Marks, W. P. Lin, G. K. Wong, Appl. Phys. Lett. 1995, 67, 365.
16. M. J. Nystrom, B. W. Wessels, J. Chen, T. J. Marks, Appl. Phys. Lett. 1996, 68, 761.
17. A. Onoe, A. Yoshida, K. Yoshida, Appl. Phys. Lett. 1996, 69, 167.
18. A. Onoe, A. Yoshida, K. Chikuma, Appl. Phys. Lett. 2001, 78, 49.
19. R. Hiskes, S. A. Dicarolis, J. Fouquet, R. K. Route, R. S. Feigelson, F. Leplingard, Mater. Res. Symp. Proc. 1994, 335, 299.
20. N. Y. Turova, E. P. Turevskaya, V. G. Kessler, M. I. Yanovskaya, The Chemistry of Metal Alkoxides, Kluwer Ac., Dordrecht, The Netherlands 2001, p. 403.
21. H. W. Davies, T. J. Leedham, A. C. Jones, P. O'Brien, A. J. P. White, D. J Williams, Polyhedron 1999, 18, 3165.
22. P. W. Williams, A. C. Jones, P. J. Wright, M. J. Crosbie, J. F. Bickley, A. Steiner, H. O. Davies, T. J. Leedham, Chem. Vap. Deposition 2002, 8, 110.
23. K. Nakamoto, Infrared and Raman Spectra of Inorganic and Coordination Compounds, 4th ed., John Wiley & Sons, Chichester, UK 1986.
24. R. Belcher, A. W. L. Dudeney, W. I. Stephen, J. Inorg. Nucl Chem. 1969, 31, 625.
25. M. H. Chisholm, S. R. Drake, A. A. Naiini, W. E. Streib, Polyhedron 1991, 10, 337.
26. A. A. Molodyk, I. E. Korsakov, M. A. Novojilov, I. E. Graboy, A. R. Kaul, G. Wahl, Chem. Vap. Deposition 2000, 6, 133.
27. A. A. Bosak, A. N. Botev, O. Y Gorbenko I. E. Graboy, S. V. Samoilenkov, A. R. Kaul, C. Dubourdieu, J. P. Senateur, J. Phys. IV 2001, 11, Pr 3-93.
28. A. Reismann, F. Holtzberg, J. Am. Chem. Soc. 1955, 77, 2117.
29. Joint Committee for Powder Diffraction Standands (JCPDS), File No. 32-0822, International Center for Diffraction Data, Newtown Square, PA 1980.
30. A. F. Chow, D. J. Lichtenwalner, R. R. Woolcott, T. M. Graettinger, O. Auciello, A. I. Kingon, L. A. Boatner, N. R. Parikh, Appl. Phys. Lett. 1994, 65, 1073.
31. B. M. Gatehouse, A. D. Wadsley, Acta Crystallogr. 1964, 17, 1545.
32. S. K. Kurtz, T. T. Perry, J. Appl. Phys. 1968, 39, 3798.
33. V. Gopalan, R. Raj, Appl. Phys. Lett. 1996, 68, 1323.
34. V. Gopalan, R. Raj, J. Appl. Phys. 1997, 81, 865.