Some tantalum(V) β-diketonate and tantalum(V) aminoalcoholate derivatives potentially important in the deposition of tantalum-containing materials

Polyhedron

Volumn 18, Issue 24, 1999, Pages 3165-3172

  Davies, Hywel O ^a   Leedham, Timothy J ^b   Jones, Anthony C ^b   O'Brien, Paul ^a   White, Andrew J P ^a   Williams, David J ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

^b Inorgtech Limited   (United Kingdom)

Author keywords

CVD; Spectroscopic data; Tantalum complexes; Diketonate compounds

Indexed keywords

CHEMICAL VAPOR DEPOSITION; HEXANE; KETONES; LIGANDS; TANTALUM COMPOUNDS;

AXIAL POSITIONS; EQUATORIAL POSITIONS; MOIST AIR; N-HEXANE; OCTAHEDRAL COORDINATION; SOLID-STATE STRUCTURES; SPECTROSCOPIC DATA; TANTALUM COMPLEXES; Β-DIKETONATE COMPOUND; Β-DIKETONES;

CHLORINE COMPOUNDS;

EID: 0001226759     PISSN: 02775387     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0277-5387(99)00236-3     Document Type: Article

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