Surface defects created by 20 keV Xe ion irradiation of Ge(1 1 1)

Surface Science

Volumn 574, Issue 2-3, 2005, Pages 175-180

  Kim, J C ^a,b   Cahill, David G ^a   Averback, R S ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b NAVAL RESEARCH LABORATORY   (United States)

Author keywords

Adatom; Surface crater; Thermal spike; Vacancy; Viscous flow

Indexed keywords

ADATOMS; SURFACE CRATERS; SURFACE DEFECTS; THERMAL SPIKE;

ALUMINA; COMPUTER SIMULATION; KINETIC ENERGY; MICROELECTRONICS; MOLECULAR DYNAMICS; THERMAL EXPANSION; VISCOUS FLOW;

XENON;

EID: 11344267511     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2004.10.026     Document Type: Article

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