Design and fabrication technologies for ultraviolet replicated micro-optics

Optical Engineering

Volumn 43, Issue 11, 2004, Pages 2575-2582

  Rudmann, Hartmut ^a   Rossi, Markus ^a  

^a Heptagon Oy   (Switzerland)

Author keywords

Micro optical elements; Optical microsystems; Replication; Ultraviolet embossing

Indexed keywords

ASPHERICS; DIFFRACTIVE OPTICS; INTERFEROMETRY; MICROLENSES; OPTICAL DESIGN; SILICA; ULTRAVIOLET DEVICES;

OPTICAL MICROSYSTEMS; REPLICATION; ULTRAVIOLET EMBOSSING; ULTRAVIOLET REPLICATED MICROOPTICS;

MICROOPTICS;

EID: 11244273976     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1803554     Document Type: Article

References (13)

1. T. J. Suleski and D. C. O'Shea, "Gray-scale masks for diffractive-optics fabrication: I. Commercial slide imagers," Appl. Opt. 34(32), 7507-7517 (1995).
2. R. Völkel, M. Eisner, and K. J. Weible, "Fabrication of aspherical microlenses in fused silica and silicon," in Proc. and Appl. of Opt. Compo, DGG Symp., pp. 81-84, Leipzig (2003).
3. M. Tanagami, S. Ogota, S. Aoyama, T. Yamashita, and K. Imanaka, "Low-wavefront aberration and high-temperature stability molded mirco Fresnel lens," IEEE Photonics Technol. Lett. 1, 384 (1989).
4. M. T. Gale, "Replication technology for holograms and diffractive optical elements," J. Imaging Sci. Technol. 41, 211 (1997).
5. P. Dannberg, R. Bierbaum, L. Erdmann, and A. Bräuter, "Wafer scale integration of micro-optic and optoelectronic elements by polymer UV reaction moulding," Proc. SPIE 3631, 244-251 (1999 ).
6. M. Rossi and I. Kallioniemi, "Micro-optical modules fabricated by high-precision replication processes," OSA TOPS 75, 108 (2002).
7. P. Dannberg, R. Bierbaum, L. Erdmann, A. Krehl, and A. Bräuer, "High precision mircooptic elements by wafer-scale replication on arbitrary substrates," Proc. SPIE 3739, 206-212 (1999 ).
8. Y. Xia and G. M. Whitesides, "Soft lithography," Annu. Rev. Mater. Sci. 28, 153-184 (1998).
9. M. T. Gale, "Direct writing of continuous-relief micro-optics," Chap. 4 in Micro Optics, H. P. Herzig, Ed., pp. 87-126, Taylor & Francis. London (1997).
10. H. Schulz, D. Lebedev, H.-C. Scheer, K. Pfeiffer, G. Bleidiessel, G. Grützner, and J. Ahopelto, "Master replication into thermosetting polymers for nanoimprinting," J. Vac. Sci. Technol. B 18, 3582 (2000).
11. M. T. Gale, J. Pedersen, H. Schütz, H. Povel, A. Gandorfer, P. Steiner, and P. N. Bernasconi, "Active alignment of replicated microlens arrays on a charge-coupled device imager," Opt. Eng. 36(5), 1510-1517 (1997).
12. J. A. Rogers, K. E. Paul, and G. M. Whitesides, "Quantifying distortions in soft lithography," J. Vac. Sci. Technol. B 16 1), 88-97 (1998).
13. T. Ammer, M. Rossi, and M. T. Gale, "On-chip replication of micro-optical structures for VCSEL to fiber coupling," Proc. SPIE 4440, 238-245 (2001)