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Volumn 3739, Issue , 1999, Pages 206-212
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High precision microoptic elements by wafer-scale replication on arbitrary substrates
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Author keywords
[No Author keywords available]
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Indexed keywords
MOLDING;
PRECISION ENGINEERING;
SUBSTRATES;
THERMAL STRESS;
MICROOPTIC ELEMENTS;
REACTION MOLDING;
WAFER SCALE REPLICATION;
OPTICAL MATERIALS;
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EID: 0032685567
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Article |
Times cited : (5)
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References (7)
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