Nanometer-scale recording on a superhard and conductive carbon film using an atomic force microscope

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 11 A, 2004, Pages 7677-7681

  Tsuchitani, Shigeki ^a   Isozaki, Masaki ^a   Kaneko, Reizo ^a   Tanaka, Ichiro ^a   Hirono, Shigeru ^b  

^a WAKAYAMA UNIVERSITY   (Japan)

^b NTT CORPORATION   (Japan)

Author keywords

Atomic force microscope; Carbon film; ECR sputtering; Graphitization; Joule heat; Probe storage; Surface modification; Thermal annealing; Thermal chemical reaction

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; ELECTRIC CONDUCTIVITY; ELECTRIC CURRENTS; ELECTRON CYCLOTRON RESONANCE; GRAPHITIZATION; MICROELECTROMECHANICAL DEVICES; NANOTECHNOLOGY; SCANNING TUNNELING MICROSCOPY; SURFACE TOPOGRAPHY; SURFACE TREATMENT;

CARBON FILMS; ECR SPUTTERING; JOULE HEAT; PROBE STORAGE; THERMAL ANNEALING; THERMAL CHEMICAL REACTION;

CONDUCTIVE FILMS;

EID: 11144237886     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.7677     Document Type: Article

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