Nanoscale electric modification and observation of sputtered carbon films by atomic force microscopy with conductive tip

Surface and Coatings Technology

Volumn 169-170, Issue , 2003, Pages 208-210

  Tajima, H ^a   Shimada, T ^a   Sawasaki, K ^a   Umemura, S ^a   Hirono, S ^b   Tsuchitani, S ^c   Kaneko, R ^c  

^a CHIBA INSTITUTE OF TECHNOLOGY   (Japan)

^b NTT CORPORATION   (Japan)

^c WAKAYAMA UNIVERSITY   (Japan)

Author keywords

Atomic force microscopy (AFM); Carbon; Conductivity; Diamond; Modification

Indexed keywords

CARBON; DATA STORAGE EQUIPMENT; ELECTRIC PROPERTIES; SPUTTERING; SURFACE PROPERTIES;

ELECTRIC MODIFICATION;

AMORPHOUS FILMS;

CARBON; COATING; FILM; MICROSCOPY; SPUTTERING; SURFACE TREATMENT;

EID: 0038807684     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00075-6     Document Type: Article

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