Eabrication of ultraplanar aluminum mirror array by novel encapsulation CMP for microoptics and MEMS applications

Journal of the Electrochemical Society

Volumn 151, Issue 11, 2004, Pages

  Ganguly, Udayan ^a   Krusius, J Peter ^a  

^a School of Operations Research and Industrial Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; DIELECTRIC MATERIALS; ELECTROCHEMISTRY; LIQUID CRYSTALS; MICROOPTICS; SILICA; SLURRIES;

GOOD REFLECTIVITY; MICRODISPLAYS; MICROELECTRMECHNICAL SYSTEMS (MEMS); SLURRY CHEMISTRY;

MIRRORS;

EID: 10944231628     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1799432     Document Type: Article

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