Manufacture of aluminium micromirror arrays using a dual damascene process

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3878, Issue , 1999, Pages 416-424

  Calton, David ^a   Stevenson, Tom ^a   Underwood, Ian ^a   Gundlach, Alan ^a  

^a UNIVERSITY OF EDINBURGH   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; ALUMINUM; ARRAYS; CHEMICAL POLISHING; ELECTRIC INSULATING MATERIALS; LIGHT MODULATORS; LIGHT REFLECTION; LIQUID CRYSTAL DISPLAYS; MICROOPTICS; SILICON WAFERS; SURFACE TOPOGRAPHY;

DAMASCENE PROCESS; MICROMIRROR;

MIRRORS;

EID: 0033318414     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)