메뉴 건너뛰기




Volumn 151, Issue 2, 2004, Pages 77-84

Design and evaluation of a MEMS optical chopper for fibre optic applications

Author keywords

[No Author keywords available]

Indexed keywords

CHOPPERS (CIRCUITS); FIBER OPTICS; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROACTUATORS; MICROOPTICS; OPTICAL VARIABLES MEASUREMENT; SILICON ON INSULATOR TECHNOLOGY;

EID: 10844294008     PISSN: 13502344     EISSN: None     Source Type: Journal    
DOI: 10.1049/ip-smt:20040099     Document Type: Article
Times cited : (17)

References (14)
  • 1
    • 0032025559 scopus 로고    scopus 로고
    • High-efficiency diffractive micromachined chopper for infrared wavelength and its application to a pyroelectric infrared sensor
    • Ueda, M., Shiono, T., and Ito, T.: 'High-efficiency diffractive micromachined chopper for infrared wavelength and its application to a pyroelectric infrared sensor', Appl. Opt., 1998, 37, (7), pp. 1165-1170
    • (1998) Appl. Opt. , vol.37 , Issue.7 , pp. 1165-1170
    • Ueda, M.1    Shiono, T.2    Ito, T.3
  • 2
    • 0029290161 scopus 로고
    • Noise performance and chopper frequency in integrated micromachined chopper-detectors in silicon
    • Wolffenbuttel, R., and Degraaf, G.: 'Noise performance and chopper frequency in integrated micromachined chopper-detectors in silicon', IEEE Trans. Instrum. Meas., 1995, 44 (2), pp. 451-453
    • (1995) IEEE Trans. Instrum. Meas. , vol.44 , Issue.2 , pp. 451-453
    • Wolffenbuttel, R.1    Degraaf, G.2
  • 3
    • 0029267432 scopus 로고
    • A piezoelectrically operated optical chopper by quartz micromachining
    • Toshiyoshi, H., Fujita, H., and Ueda, T.: 'A piezoelectrically operated optical chopper by quartz micromachining', J Microelectromechatronics, 1995, 4 (1), pp. 3-9
    • (1995) J Microelectromechatronics , vol.4 , Issue.1 , pp. 3-9
    • Toshiyoshi, H.1    Fujita, H.2    Ueda, T.3
  • 4
    • 0001666840 scopus 로고
    • Microfabricated optical chopper
    • Ching, M.T., Brennen, R.A., and White, R.M.: 'Microfabricated optical chopper', Opt. Eng., 1994, 33, (11), pp. 3634-3642
    • (1994) Opt. Eng. , vol.33 , Issue.11 , pp. 3634-3642
    • Ching, M.T.1    Brennen, R.A.2    White, R.M.3
  • 5
    • 16544373458 scopus 로고    scopus 로고
    • SOIMUMPS design rule book
    • accessed November
    • M. Walters, J. Carter, A. Cowen, and G. Hames, 'SOIMUMPS design rule book,' MEMSCAP Co., http://www.memrus.com. accessed November 2003
    • (2003)
    • Walters, M.1    Carter, J.2    Cowen, A.3    Hames, G.4
  • 6
    • 0037340959 scopus 로고    scopus 로고
    • Tilted folded-beam suspension for extending the stable travel range of the comb-drive actuator
    • Zhou, G., and Dowd, P.: 'Tilted folded-beam suspension for extending the stable travel range of the comb-drive actuator', J Micromech. Microeng., 2003, 13, pp. 178-183
    • (2003) J Micromech. Microeng. , vol.13 , pp. 178-183
    • Zhou, G.1    Dowd, P.2
  • 8
    • 0024769661 scopus 로고
    • Laterally driven polysilicon resonant microstructures
    • Tang, W.C., Nguyen, T.C., and Howe, R.T.: 'Laterally driven polysilicon resonant microstructures', Sens. Actuators A, Phys., 1989, 20, pp. 25-32
    • (1989) Sens. Actuators A, Phys. , vol.20 , pp. 25-32
    • Tang, W.C.1    Nguyen, T.C.2    Howe, R.T.3
  • 9
    • 0003538648 scopus 로고    scopus 로고
    • Fiber optic communications
    • (Prentice Hall, New Jersey)
    • Palais, J.C.: 'Fiber optic communications', (Prentice Hall, New Jersey, 1998)
    • (1998)
    • Palais, J.C.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.