Single crystal Si layers on glass fabricated by hydrophilic fusion bonding and smart-cut technology

Chinese Physics Letters

Volumn 21, Issue 12, 2004, Pages 2540-2542

  Zhen, Wan Bao ^a,b   Liu, Wei Li ^a   Song, Zhi Tang ^a   Feng, Song Lin ^a   Zhu, Shi Fu ^b   Zhao, Bei Jun ^b  

^a INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

^b SICHUAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

FLAT PANEL DISPLAYS; GLASS; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; HYDROPHILICITY; SINGLE CRYSTALS; SUBSTRATES; TENSILE STRENGTH; TENSILE TESTING; WAFER BONDING;

BONDED INTERFACE; BONDING STRENGTH; CRISTALLINITY; GLASS SUBSTRATES; HYDROPHILIC FUSION BONDINGS; SI LAYER; SINGLE-CRYSTAL SI; SMART CUT TECHNOLOGY; STRENGTH TESTING; THIN-FILMS;

SILICON WAFERS;

EID: 10844277330     PISSN: 0256307X     EISSN: None     Source Type: Journal    
DOI: 10.1088/0256-307X/21/12/061     Document Type: Article

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