Single-crystalline regions of silicon-on-glass for thin-film transistors

Solid State Phenomena

Volumn 80-81, Issue , 2001, Pages 337-342

  Andra G ^a   Bergmann, J ^a   Christiansen, S ^a   Falk, F ^a   Nerding, M ^a   Sinh, N D ^a  

^a LEIBNIZ INSTITUTE OF PHOTONIC TECHNOLOGY   (Germany)

Author keywords

Crystalline silicon films; Laser crystallization; TFT

Indexed keywords

CRYSTALLIZATION; FUSED SILICA; GRAIN BOUNDARIES; GRAIN SIZE AND SHAPE; MELTING; NEODYMIUM LASERS; SCANNING; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SINGLE CRYSTALS;

CRYSTALLITES; ELECTRICALLY INACTIVE TWIN BOUNDARIES; SILICON ON GLASS;

THIN FILM TRANSISTORS;

EID: 0034832256     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/ssp.80-81.337     Document Type: Conference Paper

References (13)