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Volumn 25, Issue 12, 2004, Pages 790-791

800 V 4H-SiC RESURF-type lateral JFETs

Author keywords

JFETs; Reduced surface field (RESURF); Silicon carbide (SiC)

Indexed keywords

ELECTRIC AUTOMOBILES; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; LITHOGRAPHY; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON CARBIDE;

EID: 10844269723     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2004.838058     Document Type: Article
Times cited : (23)

References (7)
  • 4
    • 8644253553 scopus 로고    scopus 로고
    • "A 600 V deep-implanted gate vertical JFET"
    • M. Mizukami et al., "A 600 V deep-implanted gate vertical JFET," Mater. Sci. Forum, vol. 457-460, pp. 1217-1220, 2004.
    • (2004) Mater. Sci. Forum , vol.457-460 , pp. 1217-1220
    • Mizukami, M.1
  • 5
    • 0041966046 scopus 로고    scopus 로고
    • "4H-SiC normally-off vertical junction field-effect transistor with high current density"
    • Aug
    • K. Tone, J. H. Zhao, L. Fursin, P. Alexandrov, and M. Weiner, " 4H-SiC normally-off vertical junction field-effect transistor with high current density," IEEE Electron Device Lett., vol. 24, pp. 463-465, Aug. 2003.
    • (2003) IEEE Electron Device Lett. , vol.24 , pp. 463-465
    • Tone, K.1    Zhao, J.H.2    Fursin, L.3    Alexandrov, P.4    Weiner, M.5
  • 6
    • 0031251517 scopus 로고    scopus 로고
    • "Theory of semiconductor superjunction devices"
    • Oct
    • T. Fujihira, "Theory of semiconductor superjunction devices," Jpn. J. Appl. Phys., vol. 36, no. 10, pp. 6254-6262, Oct. 1997.
    • (1997) Jpn. J. Appl. Phys. , vol.36 , Issue.10 , pp. 6254-6262
    • Fujihira, T.1
  • 7
    • 8744314022 scopus 로고    scopus 로고
    • "Flat surface after high-temperature annealing for phosphorus-ion implanted 4H-SiC(0001) using graphite cap"
    • Y. Negoro, K. Katsumoto, T. Kimoto, and H. Matsunami, "Flat surface after high-temperature annealing for phosphorus-ion implanted 4H-SiC(0001) using graphite cap," Mater. Sci. Forum, vol. 457-460, pp. 933-936, 2004.
    • (2004) Mater. Sci. Forum , vol.457-460 , pp. 933-936
    • Negoro, Y.1    Katsumoto, K.2    Kimoto, T.3    Matsunami, H.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.