TiN/CrN multilayered hard coatings with TiCrN interlayer deposited by a filtered cathodic vacuum arc technique

Journal of University of Science and Technology Beijing: Mineral Metallurgy Materials (Eng Ed)

Volumn 11, Issue 5, 2004, Pages 420-424

  Li, Chengming ^a   He, Qi ^a   Lin, Gang ^b   Sun, Xiaojun ^c   Tang, Weizhong ^a   Lu, Fanxiu ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING   (China)

^b CHINA AGRICULTURAL UNIVERSITY   (China)

^c LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

Author keywords

Drilling life; Hardness; TiCrN interlayer; TiN CrN multilayer hard coatings

Indexed keywords

ADHESION; DRILLS; ELASTIC MODULI; HARDNESS; MULTILAYERS; TITANIUM NITRIDE;

CHROMIUM NITRIDE; FILTERED CATHODIC VACUUM ARC TECHNIQUE; HALL PETCH RELATION; MODULATION PERIODS; MULTILAYER HARD COATINGS; NANOINDENTATION TESTS; SCRATCHING TESTS;

CERAMIC COATINGS;

EID: 10444280214     PISSN: 10058850     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (16)

1. P. Sathrum and B.F. Coll, Plasma and deposition enhancement by modified arc evaporation source [J], Surf. Coat. Technol., 50(1992), p.103.
2. J. Vetter, Vacuum arc coatings for tools: potential and application [J], Surf. Coat. Technol., 76/77(1995), p.719.
3. A. Anders, Growth and decay of macroparticles: a feasible approach to clean vacuum arc plasma [J], J. Appl. Phys, 82(1997), No.8, p.3679.
4. A.W. Baouchi and A.J. Perry, A study of the macroparticle distribution in cathodic arc evaporated TiN films [J], Surf. Coat. Technol., 49(1991), p.253.
5. S. Ravi, P. Silva, S. Xu, et al., Nanocrystallites in tetrahedral amorphous carbon films [J], Appl. Phys. Lett., 69(1996), p.491.
6. L.K. Cheah, X. Shi, B.K. Tay, et al., Modification of tetrahedral amorphous carbon film by concurrent Ar ion bombardment during deposition [J], Surf. Coat. Technol., 105(1998), p.91.
7. W.D. Sproul, Reactive sputter deposition of poly crystalline nitride and oxide superlattice coatings [J], Surf. Coat. Technol., 86/87(1996), p.170.
8. X.T. Zeng, TiN/NbN superlattice hard coatings deposited by unbalanced magnetron sputtering [J], Surf. Coat. Technol., 113(1999), p.75.
9. Y.M. Zhou, R. Asaki, K. Higashi, et al, Sliding wear behavior of polycrystalline TiN/CrN multilayers against an alumina ball [J], Surf. Coat. Technol., 130(2000), p.9.
10. J. Musil, Hard and superhard nanocomposite coatings [J], Surf. Coat. Technol., 125(2000), p.322.
11. R.F. Huang, L.S Wen, L.P. Guo, et al., Microstructural and indentation characterization of Ti/TiN multilayer films [J], Surf. Coat. Technol., 50(1992), p.97.
12. X. Chu, S.A. Barnett, M.S. Wong, et al, Reactive unbalanced magnetron sputter deposition of polycrystalline TiN/NbN superlattice coatings [J], Surf. Coat. Technol., 57(1993), p.13.
13. A. Thobou, C. Rousselot, C. Clement, et al., Enhancement of mechanical properties of TiN/AIN multilayers by modifying the number and the quality of interfaces [J], Surf. Coat. Technol., 124(2000), p.210.
14. X. Chu, S.A. Barnett, and M.S. Wong, Reactive unbalanced magnetron sputter deposition of polycrystalline TiN/NbN superlattice coatings [J], Surf. Coat. Technol., 57(1993), p.13.
15. S. Veprek, Conventional and new approaches towards the design of novel superhard materials [J], Surf. Coat. Technol., 97(1997), p.15.
16. Y. Zhou, R. Asaki, W.H. Soe, et al., Hardness anomaly, plastic deformation work and fretting wear properties of polycrystalline TiN/CrN multilayers [J], Wear, 236(1999), p.159.