Magnetically actuated bi-directional microactuators with permalloy and Fe/Pt hard magnet

Journal of Magnetism and Magnetic Materials

Volumn 285, Issue 3, 2005, Pages 422-432

  Pan, C T ^a   Shen, S C ^b  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Electroplating; Excimer laser; Hard magnet; Microactuator; Permalloy

Indexed keywords

DEPOSITION; ELECTROPLATING; ETCHING; EXCIMER LASERS; IRON; MAGNETIC ANISOTROPY; MAGNETIC FIELD EFFECTS; MAGNETS; PLATINUM; RESIDUAL STRESSES; SPUTTERING;

DEFLECTION ANGLE; HARD MAGNETS; PERMALLOY; WAFER ETCHING;

MICROACTUATORS;

EID: 10444258281     PISSN: 03048853     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmmm.2004.08.027     Document Type: Article

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