A study of controlling of dielectric properties of Pb(Zr, Ti)O3 thin film

IEEJ Transactions on Sensors and Micromachines

Volumn 120, Issue 12, 2000, Pages 559-564

  Hirasawa, Taku ^a   Yamamoto, Toshihiro ^a   Kotera, Hidetoshi ^a   Shima, Susumu ^a   Kanno, Isaku ^b   Torii, Hideo ^b   Takayama, Ryoichi ^b  

^a KYOTO UNIVERSITY   (Japan)

^b PANASONIC CORPORATION   (Japan)

Author keywords

MEMS; PZT

Indexed keywords

EID: 85010170714     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.120.559     Document Type: Article

References (14)

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