Aberration integrals for the low-voltage foil corrector

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 519, Issue 1-2, 2004, Pages 205-215

  Van Aken, R H ^a   Lenc, M ^b   Barth, J E ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b MASARYK UNIVERSITY   (Czech Republic)

Author keywords

Aberration correction; Aberration integrals; Chromatic aberration; Electron microscopy; Slope aberrations; Spherical aberration

Indexed keywords

ABERRATIONS; ELECTRIC POTENTIAL; ELECTRODES; ELECTRON BEAMS; ELECTRON LENSES; ELECTRON MICROSCOPY; ELECTRONS; RAY TRACING;

ABERRATION CORRECTION; ABERRATION INTEGRALS; CHROMATIC ABERRATION; SLOPE ABERRATIONS; SPHERICAL ABERRATION;

ELECTRON OPTICS;

EID: 1042281075     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2003.11.157     Document Type: Conference Paper

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