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Volumn 47, Issue 3, 1998, Pages 185-192

Characteristics and effectiveness of a foil lens for correction of spherical aberration in scanning transmission electron microscopy

Author keywords

Electron probe; Foil lens; Probe forming lens; Scanning transmission electron microscopy; Spherical aberration correction

Indexed keywords

ABERRATIONS; ASPHERICS; ELECTRONS; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; IMAGE ENHANCEMENT; SCANNING ELECTRON MICROSCOPY; SPHERES;

EID: 0031752403     PISSN: 00220744     EISSN: None     Source Type: Journal    
DOI: 10.1093/oxfordjournals.jmicro.a023579     Document Type: Article
Times cited : (10)

References (18)
  • 1
    • 0242278253 scopus 로고
    • Über einige Fehler von Elektronenlinsen
    • Scherzer O (1936) Über einige Fehler von Elektronenlinsen. Z. Phys. 101: 593-603.
    • (1936) Z. Phys. , vol.101 , pp. 593-603
    • Scherzer, O.1
  • 2
    • 0010489431 scopus 로고
    • The struggle to overcome spherical aberration in electron optics
    • eds Barer R and Cosslett V E, Academic Press, London and New York
    • Septier A (1966) The struggle to overcome spherical aberration in electron optics. In: Advances in Optical and Electron Microscopy, vol. 1, eds Barer R and Cosslett V E, pp. 204-274, (Academic Press, London and New York).
    • (1966) Advances in Optical and Electron Microscopy , vol.1 , pp. 204-274
    • Septier, A.1
  • 3
    • 0019298890 scopus 로고
    • Methods of computing optical properties and combating aberrations for low-intensity beams
    • ed. Septier A, Academic Press, New York, London, Toronto, Sydney and San Francisco
    • Hawkes P W (1980) Methods of computing optical properties and combating aberrations for low-intensity beams. In: Advances in Electronics and Electron Physics, ed. Septier A, pp. 45-157, (Academic Press, New York, London, Toronto, Sydney and San Francisco).
    • (1980) Advances in Electronics and Electron Physics , pp. 45-157
    • Hawkes, P.W.1
  • 4
    • 0018496526 scopus 로고
    • A hexapole spherical aberration corrector
    • Beck V D (1979) A hexapole spherical aberration corrector. Optik 53: 241-255.
    • (1979) Optik , vol.53 , pp. 241-255
    • Beck, V.D.1
  • 5
    • 0018983014 scopus 로고
    • A sextupole system for the correction of spherical aberration
    • Crewe A V and Kopf D (1980) A sextupole system for the correction of spherical aberration. Optik 55: 1-10.
    • (1980) Optik , vol.55 , pp. 1-10
    • Crewe, A.V.1    Kopf, D.2
  • 6
    • 0009759566 scopus 로고
    • Correction of aperture aberrations in magnetic systems with threefold symmetry
    • Rose H (1981) Correction of aperture aberrations in magnetic systems with threefold symmetry. Nucl. Instr. Methods 187: 187-199.
    • (1981) Nucl. Instr. Methods , vol.187 , pp. 187-199
    • Rose, H.1
  • 7
    • 0002685951 scopus 로고
    • Outline of a spherically corrected semiaplanatic medium-voltage transmission electron microscope
    • Rose H (1990) Outline of a spherically corrected semiaplanatic medium-voltage transmission electron microscope. Optik 85: 19-24.
    • (1990) Optik , vol.85 , pp. 19-24
    • Rose, H.1
  • 8
    • 0029321321 scopus 로고
    • Correction of the spherical aberration of a 200 kV TEM by means of a Hexapole-corrector
    • Haider M, Braunshausen G and Schwan E (1995) Correction of the spherical aberration of a 200 kV TEM by means of a Hexapole-corrector. Optik 99: 167-179.
    • (1995) Optik , vol.99 , pp. 167-179
    • Haider, M.1    Braunshausen, G.2    Schwan, E.3
  • 9
    • 37949044568 scopus 로고
    • Aberration correction in a low voltage SEM by a multipole corrector
    • Zach J and Haider M (1995) Aberration correction in a low voltage SEM by a multipole corrector. Nucl. Instr. Methods Phys. Res. A 363: 316-325.
    • (1995) Nucl. Instr. Methods Phys. Res. A , vol.363 , pp. 316-325
    • Zach, J.1    Haider, M.2
  • 10
    • 0001160818 scopus 로고
    • Sphärische und chromatische Korrektur von Elektronen-Linsen
    • Scherzer O (1947) Sphärische und chromatische Korrektur von Elektronen-Linsen. Optik 2: 114-132.
    • (1947) Optik , vol.2 , pp. 114-132
    • Scherzer, O.1
  • 11
    • 0011609859 scopus 로고
    • Korrektur vom Öffnungs-fehler der Elektronenlinse
    • Maruse S, Hiratake S, and Ichihashi M (1970) Korrektur vom Öffnungs-fehler der Elektronenlinse. Jpn. J. Appl. Phys. 9: 1549-1550.
    • (1970) Jpn. J. Appl. Phys. , vol.9 , pp. 1549-1550
    • Maruse, S.1    Hiratake, S.2    Ichihashi, M.3
  • 12
    • 0018258332 scopus 로고
    • Characteristics of the foil lens for correction of the spherical aberration of the strongly excited magnetic lens
    • Hibino M, Sugiyama S, Hanai T, and Maruse S (1978) Characteristics of the foil lens for correction of the spherical aberration of the strongly excited magnetic lens. J. Electron Microsc. 27: 259-265.
    • (1978) J. Electron Microsc. , vol.27 , pp. 259-265
    • Hibino, M.1    Sugiyama, S.2    Hanai, T.3    Maruse, S.4
  • 13
    • 0021670869 scopus 로고
    • Reduction of the probe diameter through the correction of spherical aberration by the foil lens
    • Hanai T, Hibino M, and Maruse S (1984) Reduction of the probe diameter through the correction of spherical aberration by the foil lens. J. Electron Microsc. 33: 329-334.
    • (1984) J. Electron Microsc. , vol.33 , pp. 329-334
    • Hanai, T.1    Hibino, M.2    Maruse, S.3
  • 14
    • 0028480695 scopus 로고
    • Effect of the three-fold astigmatism on the performance of the foil lens used for correction of the spherical aberration of a probe-forming lens
    • Hanai T, Hibino M, and Maruse S (1994) Effect of the three-fold astigmatism on the performance of the foil lens used for correction of the spherical aberration of a probe-forming lens. Optik 97: 86-90.
    • (1994) Optik , vol.97 , pp. 86-90
    • Hanai, T.1    Hibino, M.2    Maruse, S.3
  • 15
    • 15444346575 scopus 로고
    • Increase of current density of the electron probe by correction of the spherical aberration with a side-entry type foil lens
    • Hanai T, Arai S, and Hibino M (1995) Increase of current density of the electron probe by correction of the spherical aberration with a side-entry type foil lens. J. Electron Microsc. 44: 301-306.
    • (1995) J. Electron Microsc. , vol.44 , pp. 301-306
    • Hanai, T.1    Arai, S.2    Hibino, M.3
  • 16
    • 0022920582 scopus 로고
    • Measurement of axial geometrical aberrations of the probe-forming lens by means of the shadow image of fine particles
    • Hanai T, Hibino M, and Maruse S (1986) Measurement of axial geometrical aberrations of the probe-forming lens by means of the shadow image of fine particles. Ultramicroscopy 20: 329-336.
    • (1986) Ultramicroscopy , vol.20 , pp. 329-336
    • Hanai, T.1    Hibino, M.2    Maruse, S.3
  • 17
    • 0018634832 scopus 로고
    • Adjustment of a STEM instrument by use of shadow images
    • Cowley J M (1979) Adjustment of a STEM instrument by use of shadow images. Ultramicroscopy 4: 413-418.
    • (1979) Ultramicroscopy , vol.4 , pp. 413-418
    • Cowley, J.M.1
  • 18
    • 0020301563 scopus 로고
    • Improvement of an electron probe profile using the foil lens
    • Hanai T, Hibino M, and Maruse S (1982) Improvement of an electron probe profile using the foil lens. J. Electron Microsc. 31: 360-367.
    • (1982) J. Electron Microsc. , vol.31 , pp. 360-367
    • Hanai, T.1    Hibino, M.2    Maruse, S.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.