Evaluation of in-column energy filters for analytical electron microscopes

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 519, Issue 1-2, 2004, Pages 286-296

  Tsuno, K ^a  

^a JEOL LTD   (Japan)

Author keywords

Charged particle optics; EELS; Energy filter; ESD; ESI; Non isochromaticity

Indexed keywords

DIFFRACTIVE OPTICS; DISPERSION (WAVES); ELECTRON BEAMS; ELECTRON DIFFRACTION; ELECTRON ENERGY LOSS SPECTROSCOPY; IMAGE ANALYSIS; MONOCHROMATORS; NUCLEAR INSTRUMENTATION; OPTICAL FILTERS; OPTICAL RESOLVING POWER;

ENERGY FILTERS; ESD; ESI; NON-ISOCHROMATICITY;

ELECTRON OPTICS;

EID: 1042269602     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2003.11.165     Document Type: Conference Paper

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