Design and testing of Omega mode imaging energy filters at 200 kV

Journal of Electron Microscopy

Volumn 46, Issue 5, 1997, Pages 357-368

  Tsuno, K ^a   Kaneyama, T ^a   Honda, T ^a   Tsuda, K ^b   Terauchi, M ^b   Tanaka, M ^b  

^a JEOL LTD   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

Electron energy loss sepectroscopy; Electron optics; Energy analysis; Imaging energy filter; Omega filter

Indexed keywords

BANDPASS FILTERS; ELECTRON ENERGY LEVELS; ELECTRON SCATTERING; ELECTRONS; ENERGY DISSIPATION; LANTHANUM COMPOUNDS; OPTICAL PROPERTIES; SILICON COMPOUNDS;

ACCELERATING VOLTAGES; ELECTRON ENERGY-LOSS SPECTROSCOPIES; ELECTRON MICROSCOPE IMAGES; ENERGY; ENERGY ANALYSIS; HIGH RESOLUTION; HIGH-RESOLUTION TEM; IMAGING ENERGY FILTERS; LATTICE IMAGES; OMEGA FILTER;

ELECTRON ENERGY LOSS SPECTROSCOPY;

EID: 0030726615     PISSN: 00220744     EISSN: None     Source Type: Journal    
DOI: 10.1093/oxfordjournals.jmicro.a023531     Document Type: Article

References (15)

1. Senoussi S (1971) Etude d'um dispositif de filtrage des vitesses purement magnétique adaptable à un microscope électronique à très haute tension. Thése de 3e cycle. Univ. Paris-Orsay.
2. Castaing R, Hennequin J F, Henry L, and Slodgian G (1967) The magnetic prism as an optical system. In: Focusing of Charged Particle, vol. II, A. Septier ed., pp. 265-293, (Academic Press, New York).
3. Parker N W, Utlaut M, and Isaacson M S (1978) Design of magnetic spectrometers with second-order aberrations corrected I: Theory. Optik 51: 333-351.
4. Rose H and Plies E (1974) Entwurf eines fehlerarmen magnetischen Energie-Analysators. Optik 3: 336-341.
5. Pejas W and Rose H (1978) Outline of an imaging magnetic energy filter free of second order aberrations, Ninth Int. Cong. Electron Microsc., Toronto, vol 1, pp. 44-45.
6. Perez J Ph, Sirvin J, Seguela A, and Lacaze J C (1984) Etude an premier order, d'une systeme dispersif, magnetique, symmetric de type alpha. J. Phys. 45 C2 Suppl. 2: 171-179.
7. Lanio S (1986) High-resolution imaging magnetic energy filters with simple structure. Optik 73: 99-107.
8. Taya S, Taniguchi Y, Nakazawa E, and Usukura J (1996) Development of g-type energy filtering TEM. J. Electron Microsc. 45: 307-313.
9. Wollnik H: Private communication.
10. Degenhardt R and Rose H (1990) A compact aberration-free imaging filter with inside energy selection. Nucl. Instr. Meth. Phys. Res. A 298: 171-178.
11. Uhleman S and Rose H (1994) The MANDOLINE filter- a new high-performance imaging filter for sub-eV EFTEM. Optik 96: 163-178.
12. Rose H and Krahl D (1995) Electron optics of imaging energy filter in energy-filtering transmission electron microscopy, ed. L Reimer, Springer, Berlin, pp. 43-148.
13. Tsuno K and Munro E (1997) Design of an omega filter for a 200 kV electron microscope. Rev. Sci. Instrum. 68: 109-115.
14. Krivanek O L, Friedman S L, Gubbens A J, and Kraus B (1995) An imaging filter for biological applications. Ultramicroscopy 59: 267-282.
15. Rose H (1978) Aberration correction of homogeneous magnetic deflection systems. Optik 51: 15-38.