Modification and application of an emission microscope for continuous wavelength spectroscopy

Microelectronics Reliability

Volumn 37, Issue 10-11, 1997, Pages 1595-1598

  Rasras, M ^a   De Wolf, I ^a   Groeseneken, G ^a   Maes, H E ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENTS; RAMAN SPECTROSCOPY; RESISTORS; SEMICONDUCTING SILICON; SEMICONDUCTOR DIODES;

FORWARD BIASED DIODE; REVERSE BIASED DIODE; SPECTROSCOPIC PHOTON EMISSION MICROSCOPY;

MICROSCOPIC EXAMINATION;

EID: 0031246684     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(97)00118-2     Document Type: Article

References (4)

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2. Y. Y. Liu, J. M. Tao, D. S. H. Chang, J.C.H. Phang, and W. K. Chim, (IPFA '95), pp. 60-65, (1995).
3. K. de Kort, and P. Damink. Proc. ESREF, pp. 45-52, (1990).
4. J. Bude, N. Sano and A .Yoshii. Phys. Rev. B, 45 (11), pp. 5848, (1992).