|
|
Volumn 27, Issue 1-3, 2004, Pages 439-442
|
|
Characterization of SOI wafers by synchrotron X-ray topography
|
|
Author keywords
[No Author keywords available]
|
|
Indexed keywords
MORPHOLOGY;
SILICON WAFERS;
SURFACE TOPOGRAPHY;
SYNCHROTRONS;
THIN FILMS;
X RAY DIFFRACTION;
X RAY SCATTERING;
LATTICE DISTORTION;
SURFACE UNDULATION;
THIN FILM STRUCTURE AND MORPHOLOGY;
X-RAY DIFFRACTION AND SCATTERING;
SILICON ON INSULATOR TECHNOLOGY;
|
|
EID: 10244220017
PISSN: 12860042
EISSN: None
Source Type: Journal
DOI: 10.1051/epjap:2004067 Document Type: Conference Paper |
|
Times cited : (6)
|
|
References (10)
|
