RF-MEMS capacitive switch with isolation valley at lower frequency band

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5389, Issue , 2004, Pages 92-100

  Jung, Chang Won ^a   Ghodsian, Bahram ^a   Cetiner, Bedri A ^a   De Flaviis, Franco ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Capacitance ratio; Dielectric materials; Down state capacitance; Isolation valley; RF MEMS switch

Indexed keywords

CAPACITANCE; COPPER OXIDES; DIELECTRIC MATERIALS; HYDROFLUORIC ACID; INDUCTANCE; PERMITTIVITY; SWITCHING;

CAPACITANCE RATION; DOWN STATE CAPACITANCE; ISOLATION VALLEY; RF MEMS SWITCH;

MICROELECTROMECHANICAL DEVICES;

EID: 10044296408     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.540227     Document Type: Conference Paper

References (5)

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4. Hung-Pin Chang, Jiangyuan Qian, Cetiner, B.A., De Flaviis, F., Bachman, M., Li, G.P., "RF MEMS switches fabricated on microwave-laminate printed circuit boards," Electron Device Letters, IEEE, Volume: 24 Issue: 4, April 2003, Page(s): 227-229.
5. Cetiner, B.A., Qian, J.Y., Chang, H.P., Bachman, M., Li, G.P., De Flaviis, F., "Monolithic integration of RF MEMS switches with a diversity antenna on PCB substrate," Microwave Theory and Techniques, IEEE Transactions on, Volume: 51 Issue: 1, Jan. 2003 Page(s): 332-335.