Preparation of zinc oxide films containing Be and N atoms by radio frequency magnetron sputtering

Thin Solid Films

Volumn 472, Issue 1-2, 2005, Pages 189-194

  Sanmyo, Masahiro ^a   Tomita, Yasumasa ^a   Kobayashi, Kenkichiro ^a  

^a SHIZUOKA UNIVERSITY   (Japan)

Author keywords

Be N bonds; Doping of bonds; P TVpe znO; Sputtered films

Indexed keywords

BERYLLIUM; BINDING ENERGY; MAGNETRON SPUTTERING; NITROGEN; SAPPHIRE; THIN FILMS; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

PARTIAL NITRIDATION; RADIO FREQUENCY (RF) MAGNETRON SPUTTERING; THERMOELECTROMOTIVE FORCE; VAN DER PAUW METHOD;

ZINC OXIDE;

EID: 10044239270     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.06.197     Document Type: Article

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