Thermal diffusivity and thermoelectric figure of merit of Al 1-xInxN prepared by reactive radio-frequency sputtering

Applied Physics Letters

Volumn 83, Issue 26, 2003, Pages 5398-5400

  Yamaguchi, Shigeo ^a,b   Izaki, Ryohei ^a   Yamagiwa, Ken Ichi ^a   Taki, Kyoichiro ^a   Iwamura, Yasuo ^a   Yamamoto, Atsushi ^b  

^a KANAGAWA UNIVERSITY   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CALORIMETRY; CRYSTAL DEFECTS; DISLOCATIONS (CRYSTALS); ELECTRIC CONDUCTIVITY; HEAT FLUX; HEAT TRANSFER; MICROSTRUCTURE; ORGANIC SOLVENTS; PHONONS; SPUTTERING; THERMAL CONDUCTIVITY; THERMAL DIFFUSION IN SOLIDS; THERMAL EFFECTS; THERMOELECTRICITY; THIN FILMS; ULTRAVIOLET SPECTROSCOPY;

ISOTROPIC MEDIUM; RADIO-FREQUENCY SPUTTERING;

ALUMINUM COMPOUNDS;

EID: 0942299473     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1637156     Document Type: Article

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