Switch and rf ferroelectric MEMS: A new concept

Sensors and Actuators, A: Physical

Volumn 109, Issue 3, 2004, Pages 186-194

  Sallese, Jean Michel ^a   Fazan, Pierre ^a  

^a EPFL   (Switzerland)

Author keywords

Ferroelectric; MEMS; rf; Switch

Indexed keywords

ELECTRIC CHARGE; ELECTRIC FIELDS; ELECTRIC POTENTIAL; ELECTRODES; ELECTROMAGNETIC WAVE POLARIZATION; FERROELECTRIC DEVICES; MAXWELL EQUATIONS; MICROELECTROMECHANICAL DEVICES; PERMITTIVITY; VECTORS;

FERROELECTRIC LAYERS; OPTICAL FIELDS; SWITCH MODE OPERATIONS;

SWITCHES;

EID: 0942277677     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.10.037     Document Type: Article

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