SiGe HBT and BiCMOS Technologies

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 2003, Pages 113-116

  Washio, Katsuyoshi ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POTENTIAL; ELECTRODES; HETEROJUNCTION BIPOLAR TRANSISTORS; LSI CIRCUITS; POLYSILICON; SILICON COMPOUNDS; SURFACE ROUGHNESS;

PARASITIC CAPACITANCE; SACRIFICIAL EMITTER PROCESS (SEP);

CMOS INTEGRATED CIRCUITS;

EID: 0842309832     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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