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Applied Physics A: Materials Science and Processing

Volumn 78, Issue 3, 2004, Pages 415-421

UV laser micromachining of piezoelectric ceramic using a pulsed Nd:YAG laser

(6) Zeng, D W a Li, K b Yung, K C b Chan, H L W b Choy, C L b Xie, C S a

a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY (China)

b HONG KONG POLYTECHNIC UNIVERSITY (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CERAMIC MATERIALS; COMPOSITION EFFECTS; EPOXY RESINS; LASER ABLATION; LEAD COMPOUNDS; MICROMACHINING; NEODYMIUM LASERS; THICKNESS MEASUREMENT; X RAY PHOTOELECTRON SPECTROSCOPY;

CONCENTRIC RING; LEAD OXIDES; LEAD ZIRCONATE TITANATE CERAMICS; PYROCHLORE PHASE;

PIEZOELECTRIC MATERIALS;

EID: 0742284428 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s00339-002-1956-9 Document Type: Article

Times cited : (22)

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