SCOPUS 정보 검색 플랫폼

Volumn 95, Issue 2, 2004, Pages 705-712

Spherical deformation of compliant substrates with semiconductor device islands

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTOR LAYERS; THIN-FILM SEMICONDUCTOR STRUCTURES;

AMORPHOUS SILICON; COMPACTION; PLASTIC DEFORMATION; SILICON NITRIDE; STAINLESS STEEL; STRAIN; SUBSTRATES; THICKNESS CONTROL; THIN FILMS;

SEMICONDUCTOR DEVICE STRUCTURES;

EID: 0742284406 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.1634370 Document Type: Article

Times cited : (74)

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