Fine Patterning and Fabrication of Diamond Chips with Electron Beam and Focused-Ion Beam

New Diamond and Frontier Carbon Technology

Volumn 10, Issue 2, 2000, Pages 79-95

  Taniguchi, Jun ^a   Miyamoto, Iwao ^a  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

Author keywords

Electron beam assisted chemical etching; Field emitter tip; Ion beam assisted chemical etching; Single crystal diamond chip

Indexed keywords

EID: 0347997600     PISSN: 13449931     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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