Utilizing of hydrocarbon contamination for prevention of the surface charge-up at electron-beam assisted chemical etching of a diamond chip

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 121, Issue 1-4, 1997, Pages 507-509

  Taniguchi, Jim ^a   Miyamoto, Iwao ^a   Ohno, Naoto ^a   Honda, Satoshi ^a  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRON BEAMS; ETCHING; FILMS; HYDROCARBONS; IRRADIATION; SCANNING ELECTRON MICROSCOPY;

ELECTRON BOMBARDMENT;

SYNTHETIC DIAMONDS;

EID: 0031546188     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00449-1     Document Type: Article

References (4)

1. S.W. Pang, J. Electrochem. Soc. 133 (1986) 784.
2. M. Taneya, Y. Sugimoto and K. Akita, J. Appl. Phys. 66 (1989) 1375.
3. S. Matsui and K. Mori, Appl. Phys. Lett. 51 (1987) 1498.
4. A.N. Broers, W.W. Molzen, J.J. Cuomo and N.D. Wittle, Appl. Phys. Lett. 29 (1976) 596.