Resolution of compositional backscattered electron profiles of single interfaces in the scanning electron microscope

Scanning

Volumn 18, Issue 1, 1996, Pages 13-18

  Konkol, A ^a  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

Author keywords

Backscattered electrons; Composition; Resolution; Scanning electron microscope

Indexed keywords

ARTICLE; ELECTRON BEAM; IMAGE QUALITY; PRIORITY JOURNAL; RADIATION SCATTERING; SCANNING ELECTRON MICROSCOPY;

EID: 0029869524     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.1996.4950180103     Document Type: Article

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