Chemical-Mechanical Planarization of Low-k Polymers for Advanced IC Structures

Journal of Electronic Packaging

Volumn 124, Issue 4, 2002, Pages 362-366

  Borst, Christopher L ^a   Thakurta, Dipto G ^a   Gill, William N ^a   Gutmann, Ronald J ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0347644880     PISSN: 10437398     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1510138     Document Type: Article

References (24)

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