Influence of the deposition parameters on the texture of pyrolytic carbon layers deposited on planar substrates

Carbon

Volumn 42, Issue 2, 2004, Pages 279-286

  De Pauw, V ^a   Kalhofer S ^a   Gerthsen, D ^a  

^a UNIVERSITY OF KARLSRUHE   (Germany)

Author keywords

A. Pyrolytic carbon; B. Chemical vapor deposition; C. Electron diffraction; C. Transmission electron microscopy; D. Texture

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRON DIFFRACTION; GROWTH (MATERIALS); INTERFACES (MATERIALS); LIGHT POLARIZATION; METHANE; MICROSTRUCTURE; NUCLEATION; POLYCRYSTALLINE MATERIALS; PYROLYSIS; TEXTURES; TRANSMISSION ELECTRON MICROSCOPY;

CHEMICAL VAPOR INFILTRATION (CVI); POLARIZED LIGHT MICROSCOPY (PLM); PYROLYTIC CARBON;

ORGANIC COMPOUNDS;

EID: 0347600352     PISSN: 00086223     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.carbon.2003.10.027     Document Type: Article

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