Patterned arrays of porous InP from photolithography and electrochemical etching

Journal of Applied Physics

Volumn 94, Issue 12, 2003, Pages 7598-7603

  Su, G ^a   Guo, Q ^a   Palmer, R E ^a  

^a UNIVERSITY OF BIRMINGHAM   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC POTENTIAL; ELECTROCHEMISTRY; ENERGY GAP; ETCHING; MOLECULAR BEAM EPITAXY; PHOTOLITHOGRAPHY; PHOTOLUMINESCENCE; PHOTORESISTS; POROUS MATERIALS; SCANNING ELECTRON MICROSCOPY;

ELECTROCHEMICAL ETCHING; POROUS SURFACES; SURFACE CONTAMINATION;

SEMICONDUCTING INDIUM PHOSPHIDE;

EID: 0347566275     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1628836     Document Type: Article

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