Point defects as result of surface deformation on a GaAs wafer

Applied Physics Letters

Volumn 83, Issue 20, 2003, Pages 4128-4130

  Zamponi, C ^a   Mannig U ^a   Staab, T E M ^a   Maier, K ^a   Eichler, S ^b   Hammer, R ^b  

^a UNIVERSITY OF BONN   (Germany)

^b FREIBERGER COMPOUND MATERIALS GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DISLOCATIONS (CRYSTALS); PLASTIC DEFORMATION; POINT DEFECTS; POSITRON ANNIHILATION SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY;

SUBSURFACE DAMAGE; SURFACE DEFORMATION;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 0347410993     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1625786     Document Type: Article

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