Electrical characteristics of Ir/Au and Pd/Ir/Au ohmic contacts on p-InGaAs

Electronics Letters

Volumn 40, Issue 1, 2004, Pages 77-78

  Jang, J H ^a   Kim, S ^a   Adesida, I ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTRIC RESISTANCE; ELECTRIC RESISTANCE MEASUREMENT; HIGH TEMPERATURE OPERATIONS; METALLIZING; PHOTOLITHOGRAPHY; SEMICONDUCTING INDIUM GALLIUM ARSENIDE; SEMICONDUCTOR DOPING; THERMODYNAMIC STABILITY;

TRANSFER LENGTH METHOD (TLM);

OHMIC CONTACTS;

EID: 0347130077     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20040058     Document Type: Article

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