메뉴 건너뛰기




Volumn 26 3, Issue , 1999, Pages 219-226

Silicon piezoresistive stress sensors using MOS and bipolar transistors

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0347032859     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article
Times cited : (11)

References (44)
  • 1
    • 0014479252 scopus 로고
    • The effect of strain on mos transistors
    • Dorey, A. P. and Maddern, T. S., "The effect of strain on mos transistors," Solid-State Electronics, vol. 12, pp. 185-189, 1969.
    • (1969) Solid-State Electronics , vol.12 , pp. 185-189
    • Dorey, A.P.1    Maddern, T.S.2
  • 2
    • 0019545856 scopus 로고
    • Stress-sensitive properties of silicon-gate MOS devices
    • Mikoshiba, H., "Stress-sensitive properties of silicon-gate MOS devices," Solid-State Electronics, vol. 24, pp. 221-232, 1981.
    • (1981) Solid-State Electronics , vol.24 , pp. 221-232
    • Mikoshiba, H.1
  • 4
    • 0027251233 scopus 로고
    • Stress related offset voltage shift in a precision operational amplifier
    • Gee, S., Doan, T. and Gilbert, K., "Stress related offset voltage shift in a precision operational amplifier," IEEE ECTC Digest, pp. 755-764, 1993.
    • (1993) IEEE ECTC Digest , pp. 755-764
    • Gee, S.1    Doan, T.2    Gilbert, K.3
  • 19
    • 0027553244 scopus 로고
    • Thermal stress measurement in silicon chips encapsulated in ic plastic packages under thermal cycling
    • Miura, H., Kitano, M., Nishimura, A. and Kawai, S., "Thermal stress measurement in silicon chips encapsulated in ic plastic packages under thermal cycling," Journal of Electronic Packaging, Vol. 115(1), pp. 9-15, 1993.
    • (1993) Journal of Electronic Packaging , vol.115 , Issue.1 , pp. 9-15
    • Miura, H.1    Kitano, M.2    Nishimura, A.3    Kawai, S.4
  • 30
    • 5844370439 scopus 로고    scopus 로고
    • Piezoresistive measurement and fem analysis of mechanical stresses in 1601 plastic quad flat packs
    • Kohala, HI, June 15-19
    • Sweet, J. N., Burchett, S. N., Peterson, D. W., Hsia, A. H. and Chen, A., "Piezoresistive measurement and fem analysis of mechanical stresses in 1601 plastic quad flat packs," Proceedings of INTERpack '97, pp. 1731-1740, Kohala, HI, June 15-19, 1997.
    • (1997) Proceedings of Interpack '97 , pp. 1731-1740
    • Sweet, J.N.1    Burchett, S.N.2    Peterson, D.W.3    Hsia, A.H.4    Chen, A.5
  • 31
    • 0343045513 scopus 로고    scopus 로고
    • Measurement of the complete stress state in plastic encapsulated packages
    • Kohala, HI, June 15-19
    • Suhling, J. C., Jaeger, R. C., Lin, S. T., Moral, R. J. and Zou, Y., "Measurement of the complete stress state in plastic encapsulated packages," in the Proceedings of INTERpack '97, pp. 1741-1750, Kohala, HI, June 15-19, 1997.
    • (1997) Proceedings of Interpack '97 , pp. 1741-1750
    • Suhling, J.C.1    Jaeger, R.C.2    Lin, S.T.3    Moral, R.J.4    Zou, Y.5
  • 34
    • 84920631526 scopus 로고    scopus 로고
    • Complete stress state measurements in chip on board packages
    • MAPS, Denver, CO, April 15-17
    • Zou, Y., Suhling, J. C., Johnson, R. W. and Jaeger, R. C., "Complete stress state measurements in chip on board packages," Proceedings of MCM '98, MAPS, Denver, CO, April 15-17, 1998.
    • (1998) Proceedings of MCM '98
    • Zou, Y.1    Suhling, J.C.2    Johnson, R.W.3    Jaeger, R.C.4
  • 37
    • 0001558496 scopus 로고
    • Use of piezoresistive materials in the measurement of displacement, force, and torque
    • Mason, W. P. and Thurston, R. N., "Use of piezoresistive materials in the measurement of displacement, force, and torque," Journal of the Acoustical Society of America, vol. 29, no. 10, pp. 1096-1101, 1957.
    • (1957) Journal of the Acoustical Society of America , vol.29 , Issue.10 , pp. 1096-1101
    • Mason, W.P.1    Thurston, R.N.2
  • 38
    • 0001477655 scopus 로고
    • Piezoresistive properties of heavily doped n-type silicon
    • Tufte, O. N. and Stelzer, E. L., "Piezoresistive properties of heavily doped n-type silicon," Physical Review, vol. 133, pp. A1705-A1716, 1964.
    • (1964) Physical Review , vol.133
    • Tufte, O.N.1    Stelzer, E.L.2
  • 39
    • 33846693940 scopus 로고
    • Piezoresistance effect in germanium and silicon
    • Smith, C. S., "Piezoresistance effect in germanium and silicon," Physical Review, vol. 94, pp. 42-49, 1954.
    • (1954) Physical Review , vol.94 , pp. 42-49
    • Smith, C.S.1
  • 40
    • 0019916789 scopus 로고
    • A graphical representation of the piezoresistive coefficients in silicon
    • January
    • Kanda, Y., "A graphical representation of the piezoresistive coefficients in silicon, IEEE Trans. on Electron Devices, vol. ED-29, pp. 64-70, January 1982.
    • (1982) IEEE Trans. on Electron Devices , vol.ED-29 , pp. 64-70
    • Kanda, Y.1
  • 41
    • 0016496929 scopus 로고
    • A high sensitivity semiconductor strain sensitive circuit
    • Dorey, A. P., "A high sensitivity semiconductor strain sensitive circuit," Solid-State Electronics, vol. 18, pp. 295-299, 1975.
    • (1975) Solid-State Electronics , vol.18 , pp. 295-299
    • Dorey, A.P.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.